Tests by imec successfully show the possibility of innovation with ASML’s latest chip machines. Logic and DRAM chip structures were successfully printed, showing that chips can become smaller and more powerful than the best chips currently available.
The Belgian R&D center for the chip world has achieved breakthroughs in chip size and performance in recent tests. Tested was the new High-NA EUV machine from Dutch chipmaker ASML. The test was a success, and imec managed to print extremely small circuits for chips in just a few steps.
The innovation is possible through the use of High-NA (Numerical Aperture) that focuses ultraviolet light (EUV) more strongly. The technique nearly halves the lines on the chip. The result is a particle of silicon on which tens of billions of lines of 9.5nm thick were etched, still above the machines’ limit of 8nm. This involves both logic and DRAM structures, allowing production of both compute and memory chips.
“High NA EUV will therefore be very helpful in continuing the dimensional scaling of logic and memory technologies, one of the key pillars to push roadmaps deep into the ‘angstrom era,'” says Luc Van den hove, CEO of imec.
Commercial production
The tests are also hopeful for commercial production, as in the test lab, the researchers used chemicals and tools that commercial chip manufacturers deploy during the process.
Manufacturers pay 350 million euros for these machines. That is a high price, but in exchange, they get a tool to produce the smallest and fastest chips that currently exist. Moreover, the purchase gives the opportunity to shorten the production process, allowing chip manufacturers to save on other things such as labor hours.
Intel is the first buyer
The first two High-NA EUV machines were sold to Intel. One tool was already delivered in December, while the second is currently shipped. Installation of these machines will take months, after which testing and development will be required before chip manufacturers can produce their own unique chip at scale. Intel hopes to begin commercial production in 2027.
Orders are also in from Samsung, TSMC, Micron and SK Hynix. The third machine will supply ASML to TSMC, where Intel competitor Nvidia gets his chips.
Individual chip manufacturers can also turn to imec for testing. This research institute operates independently and has the knowledge and resources for an ideal testing environment.
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